AUROPHILICITY AND VOLATILIZATION OF L-AU-X PRECURSORS FOR ELECTRON BEAM INDUCED DEPOSITION

Will G. Carden¹, Jakub Pedziwiatr¹, Ilyas Unlu², Khalil A. Abboud¹, D. Howard Fairbrother², Lisa McElwee-White¹

1Department of Chemistry, University of Florida, Gainesville FL 32611, USA
2Department of Chemistry, Johns Hopkins University, Baltimore MD 21218, USA

Precursor transport in the gas phase is critical for deposition methods such as chemical vapor deposition (CVD) and electron beam induced deposition (EBID). Molecular symmetry and intermolecular interactions influence precursor volatilization, which provides a means to tune the structure to achieve optimal precursor transport. Within the library of Au(I) complexes of the general type L-Au-X, the sublimation temperature decreases as a function of increasing ionic radius of X (where X = Cl, Br, I). A relationship between this trend and the aurophilicity phenomenon is discussed along with preliminary results for EBID of metallic Au from Au(I) precursors.